Evolution of the Intermixing Process in Ge/Si(11) Self-Assembled Islands

Motta, Nunzio, Rosei, Federico, Sgarlata, Anna, Capellini, Giovanni, Mobillio, S., & Boscherini, Federico (2002) Evolution of the Intermixing Process in Ge/Si(11) Self-Assembled Islands. Materials Science and Engineering B: Advanced Functional Solid-state Materials, 88(2), pp. 264-268.

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In this contribution we present a study of the Ge–Si intermixing process that arises during the growth of Ge/Si(111) self-assembled islands. The samples, grown by means of a molecular beam epitaxy (MBE)-like technique, have been characterized by in-situ scanning tunneling microscopy (STM) and atomic force microscopy (AFM) complemented by ex-situ X-ray absorption fine structure (XAFS). We have observed by STM a change in the island morphological evolution, from truncated tetrahedra to atoll-like islands, that can be related to the misfit the reduction effect induced by the intermixing process. We have evaluated the intermixing by measuring the average coordination numbers of Si and Ge around a Ge atom by XAFS. We show that the Si content in the nominally pure Ge wetting layer reaches 50% while in the three-dimensional (3-D) islands it is about 25%, and that the intermixing increases with increasing deposition temperature in the 450–530 °C range.

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28 citations in Scopus
29 citations in Web of Science®
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ID Code: 10722
Item Type: Journal Article
Refereed: Yes
Additional Information: For more information, please refer to the journal's website (see hypertext link) or contact the author.
DOI: 10.1016/S0921-5107(01)00883-2
ISSN: 0921-5107
Divisions: Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering
Copyright Owner: Copyright 2002 Elsevier
Deposited On: 14 Nov 2007 00:00
Last Modified: 10 Aug 2011 17:22

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