Synthesis of Diamond-Like Carbon Films Using a Bi-Modal Sputter Deposition with Xe IONS

Rybachuk, Maksym & Bell, John M. (2007) Synthesis of Diamond-Like Carbon Films Using a Bi-Modal Sputter Deposition with Xe IONS. Surface Review and Letters (SRL), 14(4), pp. 735-738.

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An alternative approach to a sputtering process was examined where a single incident beam of Xe ions was used to simultaneously sputter a carbon target and bombard a growing film. The hypothesis that by positioning a substrate at grazing angles to the central axis of the ion beam, the additional energy provided will be beneficial to the formation of sp3 bonding. Amorphous carbon (a-C) and diamond-like carbon (DLC) films were synthesized by sputtering a graphite target from a Kaufmann-type ion source. Experimental results revealed that when a substrate was placed at grazing angles due to a secondary resputtering process, it was not possible to fabricate DLCs but only sp2-rich polymeric a-C. For DLC synthesis the optimal angles of the target and the substrate to the ion flux were found to be 30 degrees and 0 degrees, respectively, and the ion energies of 0.8–1 keV.

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2 citations in Scopus
2 citations in Web of Science®
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ID Code: 15130
Item Type: Journal Article
Refereed: Yes
DOI: 10.1142/S0218625X07010081
ISSN: 0218-625X
Subjects: Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > ATOMIC MOLECULAR NUCLEAR PARTICLE AND PLASMA PHYSICS (020200) > Plasma Physics; Fusion Plasmas; Electrical Discharges (020204)
Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > OPTICAL PHYSICS (020500) > Lasers and Quantum Electronics (020502)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Materials Engineering not elsewhere classified (091299)
Divisions: Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering
Copyright Owner: Copyright 2007 World Scientific Publishing
Copyright Statement: Electronic version of an article published as [Surface Review and Letters (SRL) 14(4):pp. 735-738] [] © [copyright World Scientific Publishing Company]
Deposited On: 13 Oct 2008 00:00
Last Modified: 29 Feb 2012 13:39

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