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Self-assembly of Ge quantum dots on silicon : an example of controlled nanomanufacturing

Bernardi, Marco, Sgarlata, Anna, Fanfoni, Massimo, Persichetti, Luca, Motta, Nunzio, & Balzarotti, Adalberto (2009) Self-assembly of Ge quantum dots on silicon : an example of controlled nanomanufacturing. Superlattices and Microstructures, 46(1-2), pp. 318-323.

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Abstract

We have grown Ge dots by physical vapor deposition on step bunched Si(111), vicinal Si(100) and oxidized Si(100) surfaces. A control of their one- and two-dimensional ordering was achieved through the combination of top-down patterning techniques (Focused Ion Beam milling) and naturally occurring instabilities. We studied the growth kinetics and self-organization of the islands using Scanning Tunnelling Microscopy in UHV and Atomic Force Microscopy, and we used a software routine to analyze the in-plane ordering of the islands on selected images. We focused on the study of the first nucleation stages of the dots, and attempted to correlate the observed behavior with the properties of high-miscut vicinal Si(100) surfaces. The relevance of this research to quantum-dots based technology is discussed.

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2 citations in Scopus
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2 citations in Web of Science®

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ID Code: 19497
Item Type: Journal Article
Additional URLs:
Keywords: Quantum dots, Self Assembly, Nanopatterning, SiGe Epitaxy, Vicinal surfaces, Focused Ion beam, Pair Distribution Function
DOI: 10.1016/j.spmi.2008.12.010
ISSN: 0749-6036
Subjects: Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) > Condensed Matter Imaging (020402)
Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) > Surfaces and Structural Properties of Condensed Matter (020406)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MANUFACTURING ENGINEERING (091000) > Manufacturing Processes and Technologies (excl. Textiles) (091006)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Elemental Semiconductors (091204)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Compound Semiconductors (091203)
Divisions: Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering
Past > Schools > School of Engineering Systems
Copyright Owner: Copyright 2009 Elsevier
Deposited On: 08 Apr 2009 09:50
Last Modified: 29 Feb 2012 23:56

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