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Ordering of Ge quantum dots on silicon surfaces via bottom-up and top-down approaches

Bernardi, Marco, Sgarlata, Anna, Motta, Nunzio, Fanfoni, Massimo, Del Moro, Dario, & Balzarotti, Adalberto (2008) Ordering of Ge quantum dots on silicon surfaces via bottom-up and top-down approaches. In ICONN 2008 - International Conference on Nanoscience and Nanotechnology, 25-29 february 2008, Melbourne.

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Abstract

The nanoscale ordering of inorganic semiconductor quantum dots (QDs) is crucial to obtain reliable structures for novel nanotechnological applications such as nanomemories, nanolasers and nanoelectronic devices. We have directly grown Ge QDs by physical vapour deposition (PVD) on Si(111), Si(100) and some of its vicinal surfaces and studied innovative bottom up techniques to order such nanostructures. Specifically, we harnessed naturally occurring instabilities due to reconstruction and intrinsic anisotropic diffusion in Si bare surfaces, such as step bunching and natural steps occurring in silicon vicinal surfaces, to order the QDs both in one dimension and in the plane. We have also shown the use of controlled quantities of surfactants, like Sb, dramatically improves the desired ordering. Moreover, we have assisted these self-assembling processes using top-down approaches like Focused Ion Beam (FIB) milling and STM nanoindentation to control the nucleation sites and the density of the Ge QDs. Real-time study of growth and selfassembly has been accomplished using Scanning Tunneling Microscopy imaging in UHV. An explanation of the occurring processes is given, and a software routine is used to quantify the ordering of the QDs both in pre-patterned and bare surfaces. Applications, mainly in the field of Nanocrystal Nonvolatile Memories, are discussed.

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ID Code: 19537
Item Type: Conference Item (Presentation)
Keywords: Quantum dots, Self Assembly, Nanopatterning, Focused Ion Beam, SiGe Epitaxy, Pair Distribution Function
DOI: 10.1109/ICONN.2008.4639268
ISBN: 1424415047
Subjects: Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) > Condensed Matter Imaging (020402)
Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) > Surfaces and Structural Properties of Condensed Matter (020406)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Elemental Semiconductors (091204)
Australian and New Zealand Standard Research Classification > TECHNOLOGY (100000) > NANOTECHNOLOGY (100700) > Nanofabrication Growth and Self Assembly (100706)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Compound Semiconductors (091203)
Divisions: Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering
Past > Schools > School of Engineering Systems
Copyright Owner: Copyright 2008 IEEE
Deposited On: 09 Apr 2009 12:24
Last Modified: 29 Feb 2012 23:44

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