A New Atmospheric Pressure Plasma Deposition Process for Carbon and Titanium Thin Films Fabrication
Bell, John, Fredericks, Peter, Kiriakos (Izake), Emad, Paulmier, Thierry, & Runge, Claire (2005) A New Atmospheric Pressure Plasma Deposition Process for Carbon and Titanium Thin Films Fabrication. Materials Forum, 29, pp. 71-76.
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|Item Type:||Journal Article|
|Keywords:||Film Deposition, Gas Discharge, Carbon Films|
|Subjects:||Australian and New Zealand Standard Research Classification > CHEMICAL SCIENCE (030000) > PHYSICAL CHEMISTRY (INCL. STRUCTURAL) (030600) > Catalysis and Mechanisms of Reactions (030601)|
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Materials Engineering not elsewhere classified (091299)
|Divisions:||Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering|
Past > QUT Faculties & Divisions > Faculty of Science and Technology
|Deposited On:||17 Jun 2009 23:20|
|Last Modified:||17 Jun 2009 23:20|
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