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A New Atmospheric Pressure Plasma Deposition Process for Carbon and Titanium Thin Films Fabrication

Bell, John, Fredericks, Peter, Kiriakos (Izake), Emad, Paulmier, Thierry, & Runge, Claire (2005) A New Atmospheric Pressure Plasma Deposition Process for Carbon and Titanium Thin Films Fabrication. Materials Forum, 29, pp. 71-76.

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4 citations in Scopus
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ID Code: 22687
Item Type: Journal Article
Keywords: Film Deposition, Gas Discharge, Carbon Films
ISSN: 1447-6738
Subjects: Australian and New Zealand Standard Research Classification > CHEMICAL SCIENCE (030000) > PHYSICAL CHEMISTRY (INCL. STRUCTURAL) (030600) > Catalysis and Mechanisms of Reactions (030601)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Materials Engineering not elsewhere classified (091299)
Divisions: Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering
Past > QUT Faculties & Divisions > Faculty of Science and Technology
Deposited On: 17 Jun 2009 23:20
Last Modified: 17 Jun 2009 23:20

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