A Study on the Thermal Behavior of Fabrication Processes for Micro-accelerometer by SOI Wafers
Jeong, Young-Jae, Kim, Ill-Soo, Kim, O-S, & Yarlagadda, Prasad (2002) A Study on the Thermal Behavior of Fabrication Processes for Micro-accelerometer by SOI Wafers. Journal of Materials Processing Technology, 130-131, pp. 680-684.
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|Item Type:||Journal Article|
|Divisions:||Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering|
|Deposited On:||17 Jun 2009 13:42|
|Last Modified:||10 Aug 2011 15:12|
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