Ordering of Ge islands on Si(001) substrates patterned by nanoindentation
Persichetti, Luca , Capasso, Andrea, Ruffell, Simon , Sgarlata, Anna , Fanfoni, Massimo , Motta, Nunzio, & Balzarotti, Adalberto (2011) Ordering of Ge islands on Si(001) substrates patterned by nanoindentation. Thin Solid Films, 519(13), pp. 4207-4211.
Spatial organization of Ge islands, grown by physical vapor deposition, on prepatterned Si(001) substrates has been investigated. The substrates were patterned prior to Ge deposition by nanoindentation. Characterization of Ge dots is performed by atomic force microscopy and scanning electron microscopy. The nanoindents act as trapping sites, allowing ripening of Ge islands at those locations during subsequent deposition and diffusion of Ge on the surface. The results show that island ordering is intrinsically linked to the nucleation and growth at indented sites and it strongly depends on pattern parameters.
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|Item Type:||Journal Article|
|Keywords:||silicon, germanium islands, self-assembly, nanoparticles, nanoindentation, atomic force microscopy, nucleation, growth, germanium dots|
|Subjects:||Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) > Surfaces and Structural Properties of Condensed Matter (020406)|
Australian and New Zealand Standard Research Classification > TECHNOLOGY (100000) > NANOTECHNOLOGY (100700) > Nanofabrication Growth and Self Assembly (100706)
Australian and New Zealand Standard Research Classification > TECHNOLOGY (100000) > NANOTECHNOLOGY (100700) > Nanomaterials (100708)
|Divisions:||Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering|
Past > Schools > School of Engineering Systems
|Copyright Owner:||Copyright 2010 Elsevier|
|Copyright Statement:||This is the author’s version of a work that was accepted for publication in Thin Solid Films. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Thin Solid Films, [VOL 519, ISSUE 13, (2011)] DOI: 10.1016/j.tsf.2011.01.390|
|Deposited On:||22 Feb 2011 09:44|
|Last Modified:||04 Nov 2013 11:08|
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