Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions
Rybachuk, Maksym & Bell, John (2008) Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions. Journal of Physics, 100(8), pp. 1-4.
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| ID Code: | 43059 |
|---|---|
| Item Type: | Journal Article |
| Keywords: | Deposition by Sputtering, Nucleation and Growth, Carbon, Ion Deposition, Thin Films |
| DOI: | 10.1088/1742-6596/100/8/082009 |
| ISSN: | 1742-6596 |
| Subjects: | Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > ATOMIC MOLECULAR NUCLEAR PARTICLE AND PLASMA PHYSICS (020200) > Plasma Physics; Fusion Plasmas; Electrical Discharges (020204) Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > CHEMICAL ENGINEERING (090400) |
| Divisions: | Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering Past > Schools > School of Engineering Systems |
| Deposited On: | 13 Jul 2011 23:09 |
| Last Modified: | 03 Dec 2012 12:08 |
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