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Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions

Rybachuk, Maksym & Bell, John (2008) Growth of diamond-like carbon films using low energy ion beam sputter - bombardment deposition with Ar ions. Journal of Physics, 100(8), pp. 1-4.

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ID Code: 43059
Item Type: Journal Article
Keywords: Deposition by Sputtering, Nucleation and Growth, Carbon, Ion Deposition, Thin Films
DOI: 10.1088/1742-6596/100/8/082009
ISSN: 1742-6596
Subjects: Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > ATOMIC MOLECULAR NUCLEAR PARTICLE AND PLASMA PHYSICS (020200) > Plasma Physics; Fusion Plasmas; Electrical Discharges (020204)
Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > CHEMICAL ENGINEERING (090400)
Divisions: Past > QUT Faculties & Divisions > Faculty of Built Environment and Engineering
Past > Schools > School of Engineering Systems
Deposited On: 13 Jul 2011 23:09
Last Modified: 17 Jul 2014 13:01

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