QUT ePrints

Hardness of silicon nitride thin films characterised by nanoindentation and nanoscratch deconvolution methods

Liu, Sheng , Huang, Han , & Gu, YuanTong (2012) Hardness of silicon nitride thin films characterised by nanoindentation and nanoscratch deconvolution methods. Materials Science and Technology, 28(9-10), pp. 1172-1176.

View at publisher

Abstract

Plasma enhanced chemical vapour deposition silicon nitride thin films are widely used in microelectromechanical system devices as structural materials because the mechanical properties of those films can be tailored by adjusting deposition conditions. However, accurate measurement of the mechanical properties, such as hardness, of films with thicknesses at nanometric scale is challenging. In the present study, the hardness of the silicon nitride films deposited on silicon substrate under different deposit conditions was characterised using nanoindentation and nanoscratch deconvolution methods. The hardness values obtained from the two methods were compared. The effect of substrate on the measured results was discussed.

Impact and interest:

2 citations in Scopus
Search Google Scholar™
2 citations in Web of Science®

Citation countsare sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 53438
Item Type: Journal Article
Keywords: Thin film, Nanoindentation, Nanoscratch, Hardness
DOI: 10.1179/1743284712Y.0000000005
ISSN: 0267-0836
Subjects: Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Metals and Alloy Materials (091207)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MECHANICAL ENGINEERING (091300) > Numerical Modelling and Mechanical Characterisation (091307)
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Past > QUT Faculties & Divisions > Faculty of Science and Technology
Deposited On: 03 Sep 2012 08:41
Last Modified: 13 Jun 2013 01:09

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page