Fast scanning electron microscope (FSEM)

Ross, Timothy J., Wang, Ming L., & Mackinnon, I.D.R. (1993) Fast scanning electron microscope (FSEM). US Patent 5,254,857.

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High magnification and large depth of field with a temporal resolution of less than 100 microseconds are possible using the present invention which combines a linear electron beam produced by a tungsten filament from an SX-40A Scanning Electron Microscope (SEM), a magnetic deflection coil with lower inductance resulting from reducing the number of turns of the saddle-coil wires, while increasing the diameter of the wires, a fast scintillator, photomultiplier tube, photomultiplier tube base, and signal amplifiers and a high speed data acquisition system which allows for a scan rate of 381 frames per second and 256.times.128 pixel density in the SEM image at a data acquisition rate of 25 MHz. The data acquisition and scan position are fully coordinated. A digitizer and a digital waveform generator which generates the sweep signals to the scan coils run off the same clock to acquire the signal in real-time.

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ID Code: 58355
Item Type: Other
Refereed: No
Additional Information: Filed: October 19th, 1992.
Additional URLs:
Keywords: dynamic event imaging, spatial resolution, scanning coils, high speed impact
Subjects: Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > OTHER ENGINEERING (099900) > Engineering Instrumentation (099902)
Divisions: Current > Institutes > Institute for Future Environments
Deposited On: 17 Mar 2013 22:43
Last Modified: 17 Mar 2013 22:43

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