Fast scanning electron microscope (FSEM)

Ross, Timothy J., Wang, Ming L., & Mackinnon, I.D.R. (1993) Fast scanning electron microscope (FSEM). US Patent 5,254,857.

View at publisher

Abstract

High magnification and large depth of field with a temporal resolution of less than 100 microseconds are possible using the present invention which combines a linear electron beam produced by a tungsten filament from an SX-40A Scanning Electron Microscope (SEM), a magnetic deflection coil with lower inductance resulting from reducing the number of turns of the saddle-coil wires, while increasing the diameter of the wires, a fast scintillator, photomultiplier tube, photomultiplier tube base, and signal amplifiers and a high speed data acquisition system which allows for a scan rate of 381 frames per second and 256.times.128 pixel density in the SEM image at a data acquisition rate of 25 MHz. The data acquisition and scan position are fully coordinated. A digitizer and a digital waveform generator which generates the sweep signals to the scan coils run off the same clock to acquire the signal in real-time.

Impact and interest:

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 58355
Item Type: Other
Refereed: No
Additional Information: Filed: October 19th, 1992.
Additional URLs:
Keywords: dynamic event imaging, spatial resolution, scanning coils, high speed impact
Subjects: Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > OTHER ENGINEERING (099900) > Engineering Instrumentation (099902)
Divisions: Current > Institutes > Institute for Future Environments
Deposited On: 17 Mar 2013 22:43
Last Modified: 17 Mar 2013 22:43

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page