Fast scanning electron microscope (FSEM)
Ross, Timothy J., Wang, Ming L., & Mackinnon, I.D.R. (1993) Fast scanning electron microscope (FSEM). US Patent 5,254,857.
High magnification and large depth of field with a temporal resolution of less than 100 microseconds are possible using the present invention which combines a linear electron beam produced by a tungsten filament from an SX-40A Scanning Electron Microscope (SEM), a magnetic deflection coil with lower inductance resulting from reducing the number of turns of the saddle-coil wires, while increasing the diameter of the wires, a fast scintillator, photomultiplier tube, photomultiplier tube base, and signal amplifiers and a high speed data acquisition system which allows for a scan rate of 381 frames per second and 256.times.128 pixel density in the SEM image at a data acquisition rate of 25 MHz. The data acquisition and scan position are fully coordinated. A digitizer and a digital waveform generator which generates the sweep signals to the scan coils run off the same clock to acquire the signal in real-time.
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|Additional Information:||Filed: October 19th, 1992.|
|Keywords:||dynamic event imaging, spatial resolution, scanning coils, high speed impact|
|Subjects:||Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > OTHER ENGINEERING (099900) > Engineering Instrumentation (099902)|
|Divisions:||Current > Institutes > Institute for Future Environments|
|Deposited On:||17 Mar 2013 22:43|
|Last Modified:||17 Mar 2013 22:43|
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