Pt/anodized TiO2/SiC-based MOS device for hydrocarbon sensing

Shafiei, M., Sadek, A.Z., Yu, J., Arsat, R., Kalantar-zadeh, K., Yu, X.F., Partridge, J.G., & Wlodarski, W. (2008) Pt/anodized TiO2/SiC-based MOS device for hydrocarbon sensing. In Al-Sarawi, Said F., Varadan, Vijay K., Weste, Neil, & Kalantar-Zadeh, Kourosh (Eds.) Smart Structures, Devices, and Systems IV, SPIE, Melbourne, VIC, 72680K-72680K.

[img] Accepted Version (PDF 1MB)
Administrators only | Request a copy from author

View at publisher


Pt/anodized TiO2/SiC based metal-oxide-semiconductor (MOS) devices were fabricated and characterized for their sensitivity towards propene (C3H6). Titanium (Ti) thin films were deposited onto the SiC substrates using a filtered cathodic vacuum arc (FCVA) method. Fluoride ions containing neutral electrolyte (0.5 wt% NH4F in ethylene glycol)were used to anodize the Ti films. The anodized films were subsequently annealed at 600 °C for 4 hrs in an oxygen rich environment to obtain TiO2. The current-voltage(I-V) characteristics of the Pt/TiO2/SiC devices were measured in different concentrations of propene. Exposure to the analyte gas caused a change in the Schottky barrier height and hence a lateral shift in the I-V characteristics. The effective change in the barrier height for 1% propene was calculated as 32.8 meV at 620°C. The dynamic response of the sensors was also investigated and a voltage shift of 157 mV was measured at 620°C during exposure to 1% propene.

Impact and interest:

0 citations in Scopus
Search Google Scholar™

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 59613
Item Type: Conference Paper
Refereed: Yes
Keywords: Gas sensor, propene, TiO2, Schottky diode
DOI: 10.1117/12.810108
ISBN: 9780819475206
ISSN: 0277-786X
Subjects: Australian and New Zealand Standard Research Classification > CHEMICAL SCIENCE (030000) > ANALYTICAL CHEMISTRY (030100) > Sensor Technology (Chemical aspects) (030107)
Australian and New Zealand Standard Research Classification > TECHNOLOGY (100000) > NANOTECHNOLOGY (100700) > Nanomaterials (100708)
Australian and New Zealand Standard Research Classification > TECHNOLOGY (100000) > NANOTECHNOLOGY (100700) > Nanoscale Characterisation (100712)
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2008 SPIE
Deposited On: 03 May 2013 02:27
Last Modified: 17 Jul 2013 09:45

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page