Ethanol sensitivity of thermally evaporated nanostructured WO3 thin films doped and implanted with Fe

Ahsan, M., Ahmad, M.Z., Tesfamichael, Tuquabo, Bell, John, & Yarlagadda, Prasad (2013) Ethanol sensitivity of thermally evaporated nanostructured WO3 thin films doped and implanted with Fe. Applied Mechanics and Materials, 333-335(2013), pp. 1938-1945.

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Ethanol sensing performance of gas sensors made of Fe doped and Fe implanted nanostructured WO3 thin films prepared by a thermal evaporation technique was investigated. Three different types of nanostructured thin films, namely, pure WO3 thin films, iron-doped WO3 thin films by co-evaporation and Fe-implanted WO3 thin films have been synthesized. All the thin films have a film thickness of 300 nm. The physical, chemical and electronic properties of these films have been optimized by annealing heat treatment at 300ºC and 400ºC for 2 hours in air. Various analytical techniques were employed to characterize these films. Atomic Force Microscopy and Transmission Electron Microscopy revealed a very small grain size of the order 5-10 nm in as-deposited WO3 films, and annealing at 300ºC or 400ºC did not result in any significant change in grain size. This study has demonstrated enhanced sensing properties of WO3 thin film sensors towards ethanol at lower operating temperature, which was achieved by optimizing the physical, chemical and electronic properties of the WO3 film through Fe doping and annealing.

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ID Code: 60106
Item Type: Journal Article
Refereed: No
Keywords: Gas Sensor, Ethanol, Nano-Structured Materials, Thin Films, Nano-Structured Materials
DOI: 10.4028/
ISSN: 1660-9336
Subjects: Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Metals and Alloy Materials (091207)
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2013 Trans Tech Publications Ltd.
Deposited On: 20 May 2013 22:54
Last Modified: 09 May 2016 05:12

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