Fabrication of SiGe rings and holes on Si(001) by flash annealing

Persichetti, Luca, Capasso, Andrea, Sgarlata, Anna, Quatela, Alessia, Kaciulis, Saulius, Mezzi, Alessio, Notarianni, Marco, Motta, Nunzio, Fanfoni, Massimo, & Balzarotti, Adalberto (2013) Fabrication of SiGe rings and holes on Si(001) by flash annealing. Applied Surface Science, 283, pp. 813-819.

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Abstract

We show that SiGe islands are transformed into nanoholes and rings by annealing treatments only and without Si capping. Rings are produced by a rapid flash heating at temperatures higher than the melting point of Ge, whereas nanoholes are produced by several minute annealing. The rings are markedly rich in Si with respect to the pristine islands, suggesting that the evolution path from islands to rings is driven by the selective dissolution of Ge occurring at high temperature.

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ID Code: 60696
Item Type: Journal Article
Refereed: Yes
Keywords: Heteroepitaxial growth, Quantum dots, Nanorings, Nanoholes
DOI: 10.1016/j.apsusc.2013.07.024
ISSN: 0169-4332
Subjects: Australian and New Zealand Standard Research Classification > PHYSICAL SCIENCES (020000) > CONDENSED MATTER PHYSICS (020400) > Surfaces and Structural Properties of Condensed Matter (020406)
Australian and New Zealand Standard Research Classification > ENGINEERING (090000) > MATERIALS ENGINEERING (091200) > Compound Semiconductors (091203)
Australian and New Zealand Standard Research Classification > TECHNOLOGY (100000) > NANOTECHNOLOGY (100700) > Nanomaterials (100708)
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2013 Elsevier
Copyright Statement: This is the author’s version of a work that was accepted for publication in Applied Surface Science. Changes resulting from the publishing process, such as peer review, editing, corrections, structural formatting, and other quality control mechanisms may not be reflected in this document. Changes may have been made to this work since it was submitted for publication. A definitive version was subsequently published in Applied Surface Science, [VOL 283, (2013)] DOI: 10.1016/j.apsusc.2013.07.024
Deposited On: 08 Oct 2013 03:10
Last Modified: 15 Oct 2015 16:15

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