Condition monitoring and operational decision making in semiconductor manufacturing

Cholette, Michael E., Celen, Merve, Djurdjanovic, Dragan, & Rasberry, John D. (2013) Condition monitoring and operational decision making in semiconductor manufacturing. IEEE Transactions on Semiconductor Manufacturing, 26(4), pp. 454-464.

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Today, the majority of semiconductor fabrication plants (fabs) conduct equipment preventive maintenance based on statistically-derived time- or wafer-count-based intervals. While these practices have had relative success in managing equipment availability and product yield, the cost, both in time and materials, remains high. Condition-based maintenance has been successfully adopted in several industries, where costs associated with equipment downtime range from potential loss of life to unacceptable affects to companies’ bottom lines. In this paper, we present a method for the monitoring of complex systems in the presence of multiple operating regimes. In addition, the new representation of degradation processes will be used to define an optimization procedure that facilitates concurrent maintenance and operational decision-making in a manufacturing system. This decision-making procedure metaheuristically maximizes a customizable cost function that reflects the benefits of production uptime, and the losses incurred due to deficient quality and downtime. The new degradation monitoring method is illustrated through the monitoring of a deposition tool operating over a prolonged period of time in a major fab, while the operational decision-making is demonstrated using simulated operation of a generic cluster tool.

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ID Code: 64647
Item Type: Journal Article
Refereed: Yes
Keywords: Condition monitoring, Condition-based maintenance, Semiconductor manufacturing
DOI: 10.1109/TSM.2013.2268861
ISSN: 0894-6507
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2013 IEEE
Copyright Statement: Personal use of this material is permitted. Permission from IEEE must be obtained for all other users, including reprinting/ republishing this material for advertising or promotional purposes, creating new collective works for resale or redistribution to servers or lists, or reuse of any copyrighted components of this work in other works.
Deposited On: 07 Jan 2014 22:43
Last Modified: 10 Jan 2014 05:20

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