Imaging of the asymmetric DC discharge: visualization to adjust plasma in the novel PECVD reactor

Primc, G., Levchenko, I., Kumar, S., Cvelbar, U., Mozetic, M., & Ostrikov, K. (2014) Imaging of the asymmetric DC discharge: visualization to adjust plasma in the novel PECVD reactor. IEEE Transactions on Plasma Science, 42(10), pp. 2564-2565.

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Abstract

Normal asymmetric glow dc discharge in the thermal furnace converted into the efficient PECVD system was imaged to adjust the structure of the plasma column to the two possible localizations of the process zone. The visualization revealed the possibility to use short and long discharge configurations for the plasma-enabled growth and processing of various nanostructures in the modified setup. Images of the discharge in the two localizations are presented.

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ID Code: 73493
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1109/TPS.2014.2315789
ISSN: 0093-3813
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 08 Jul 2014 05:04
Last Modified: 08 Jan 2015 05:42

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