Dense plasmas in magnetic traps : generation of focused ion beams with controlled ion-to-neutral flux ratios
Baranov, Oleg, Zhong, Xiaoxia, Fang, Jinghua, Kumar, Shailesh, Xu, Shuyan, Cvelbar, Uroš, Mariotti, Davide, & Ostrikov, Kostya (2014) Dense plasmas in magnetic traps : generation of focused ion beams with controlled ion-to-neutral flux ratios. IEEE Transactions on Plasma Science, 42(10), pp. 2518-2519.
Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
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|Item Type:||Journal Article|
|Keywords:||Arc discharge, ion beam, magnetic traps|
|Divisions:||Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
|Copyright Owner:||Copyright 2014 IEEE|
|Deposited On:||08 Jul 2014 04:40|
|Last Modified:||08 Jan 2015 05:49|
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