Copper-capped carbon nanocones on silicon : plasma-enabled growth control

Kumar, Shailesh, Levchenko, Igor, Farrant, David, Keidar, Michael, Kersten, Holger, & Ostrikov, Kostya (2012) Copper-capped carbon nanocones on silicon : plasma-enabled growth control. ACS Applied Materials & Interfaces, 4(11), pp. 6021-6029.

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Controlled self-organized growth of vertically aligned carbon nanocone arrays in a radio frequency inductively coupled plasma-based process is studied. The experiments have demonstrated that the gaps between the nanocones, density of the nanocone array, and the shape of the nanocones can be effectively controlled by the process parameters such as gas composition (hydrogen content) and electrical bias applied to the substrate. Optical measurements have demonstrated lower reflectance of the nanocone array as compared with a bare Si wafer, thus evidencing their potential for the use in optical devices. The nanocone formation mechanism is explained in terms of redistribution of surface and volumetric fluxes of plasma-generated species in a developing nanocone array and passivation of carbon in narrow gaps where the access of plasma ions is hindered. Extensive numerical simulations were used to support the proposed growth mechanism.

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3 citations in Scopus
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3 citations in Web of Science®

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ID Code: 73627
Item Type: Journal Article
Refereed: Yes
Keywords: carbon nanocones; catalyst; plasma; self-organization; optical properties; sensing
DOI: 10.1021/am301680a
ISSN: 1944-8252
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 09 Jul 2014 03:46
Last Modified: 10 Jul 2014 05:21

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