Nanoscale plasma chemistry enables fast, size-selective nanotube nucleation

Ostrikov, Kostya & Mehdipour, Hamid (2012) Nanoscale plasma chemistry enables fast, size-selective nanotube nucleation. Journal of the American Chemical Society, 134(9), pp. 4303-4312.

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The possibility of fast, narrow-size/chirality nucleation of thin single-walled carbon nanotubes (SWCNTs) at low, device-tolerant process temperatures in a plasma-enhanced chemical vapor deposition (CVD) is demonstrated using multiphase, multiscale numerical experiments. These effects are due to the unique nanoscale reactive plasma chemistry (NRPC) on the surfaces and within Au catalyst nanoparticles. The computed three-dimensional process parameter maps link the nanotube incubation times and the relative differences between the incubation times of SWCNTs of different sizes/chiralities to the main plasma- and precursor gas-specific parameters and explain recent experimental observations. It is shown that the unique NRPC leads not only to much faster nucleation of thin nanotubes at much lower process temperatures, but also to better selectivity between the incubation times of SWCNTs with different sizes and chiralities, compared to thermal CVD. These results are used to propose a time-programmed kinetic approach based on fast-responding plasmas which control the size-selective, narrow-chirality nucleation and growth of thin SWCNTs. This approach is generic and can be used for other nanostructure and materials systems.

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18 citations in Web of Science®

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ID Code: 73630
Item Type: Journal Article
Refereed: Yes
DOI: 10.1021/ja210813s
ISSN: 1520-5126
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 09 Jul 2014 04:00
Last Modified: 10 Jul 2014 05:40

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