Control of ion density distribution by magnetic traps for plasma electrons

Baranov, Oleg, Romanov, Maxim, Fang, Jinghua, Cvelbar, Uros, & Ostrikov, Kostya (2012) Control of ion density distribution by magnetic traps for plasma electrons. Journal of Applied Physics, 112(7), 073302.

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The effect of a magnetic field of two magnetic coils on the ion current density distribution in the setup for low-temperature plasma deposition is investigated. The substrate of 400 mm diameter is placed at a distance of 325 mm from the plasma duct exit, with the two magnetic coils mounted symmetrically under the substrate at a distance of 140 mm relative to the substrate centre. A planar probe is used to measure the ion current density distribution along the plasma flux cross-sections at distances of 150, 230, and 325 mm from the plasma duct exit. It is shown that the magnetic field strongly affects the ion current density distribution. Transparent plastic films are used to investigate qualitatively the ion density distribution profiles and the effect of the magnetic field. A theoretical model is developed to describe the interaction of the ion fluxes with the negative space charge regions associated with the magnetic trapping of the plasmaelectrons. Theoretical results are compared with the experimental measurements, and a reasonable agreement is demonstrated.

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ID Code: 73640
Item Type: Journal Article
Refereed: Yes
DOI: 10.1063/1.4757022
ISSN: 0021-8979
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 09 Jul 2014 04:33
Last Modified: 10 Jul 2014 06:00

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