Different nanostructures from different plasmas : nanoflowers and nanotrees on silicon

Ostrikov, K., Kumar, S., Cheng, Q.J., Rider, A.E., Yajadda, M.M.A., Han, Z.J., Seo, D.H., van der Laan, T.A., Yick, S., Tam, E., & Levchenko, I. (2011) Different nanostructures from different plasmas : nanoflowers and nanotrees on silicon. IEEE Transactions on Plasma Science, 39(11), pp. 2796-2797.

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Using the advanced radio-frequency plasma-assisted magnetron deposition system, various nanostructures such as nanoflowers of carbon nanotubes, ZnO nanobelts, and silicon nanotrees were successfully synthesized. In this paper, we present the photographs of ICP and magnetron discharges, the photograph of a complex plasma structure, and the SEM images of various nanostructures synthesized in the system with magnetron and ICP sources operating simultaneously.

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3 citations in Scopus
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3 citations in Web of Science®

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ID Code: 73723
Item Type: Journal Article
Refereed: Yes
Keywords: II-VI semiconductors, carbon nanotubes, elemental semiconductors, nanofabrication, plasma deposition
DOI: 10.1109/TPS.2011.2159022
ISSN: 1939-9375
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 10 Jul 2014 03:16
Last Modified: 11 Jul 2014 03:50

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