Kinetics of the initial stage of silicon surface oxidation : Deal–Grove or surface nucleation?

Levchenko, I., Cvelbar, U., & Ostrikov, K. (2009) Kinetics of the initial stage of silicon surface oxidation : Deal–Grove or surface nucleation? Applied Physics Letters, 95(2), 021502-1.

View at publisher (open access)

Abstract

The nucleation-initiated oxidation of a Si surface at very low temperatures in plasmas is demonstrated experimentally, in contrast to the Deal-Grove mechanism, which predicts Si oxidation at a Si/SiO interface and cannot adequately describe the formation of SiO nanodots and oxidation rates at very low (several nanometers) oxide thickness. Based on the experimental results, an alternative oxidation scenario is proposed and supported by multiscale numerical simulations suggesting that saturation of micro- and nanohillocks with oxygen is a trigger mechanism for initiation of Si surface oxidation. This approach is generic and can be applied to describe the kinetics of low-temperature oxidation of other materials. © 2009 American Institute of Physics.

Impact and interest:

16 citations in Scopus
Search Google Scholar™
17 citations in Web of Science®

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 73765
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Surface oxidation, Plasma materials processing, Nucleation
DOI: 10.1063/1.3179557
ISSN: 0003-6951
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2009 American Institute of Physics.
Deposited On: 11 Jul 2014 02:21
Last Modified: 22 Aug 2014 01:09

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page