Plasma-driven self-organization of Ni nanodot arrays on Si(100)

Levchenko, I., Ostrikov, Kostya, Diwan, K., Winkler, K., & Mariotti, D. (2008) Plasma-driven self-organization of Ni nanodot arrays on Si(100). Applied Physics Letters, 93(18), p. 183102.

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The results of the combined experimental and numerical study suggest that nonequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of various materials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles. © 2008 American Institute of Physics.

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33 citations in Scopus
36 citations in Web of Science®
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ID Code: 73768
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.3012572
ISSN: 0003-6951
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2008 American Institute of Physics
Deposited On: 11 Jul 2014 00:30
Last Modified: 21 Jun 2017 23:01

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