Hydrogen in plasma-nanofabrication : selective control of nanostructure heating and passivation

Wolter, M., Levchenko, I., Kersten, H., & Ostrikov, K. (2010) Hydrogen in plasma-nanofabrication : selective control of nanostructure heating and passivation. Applied Physics Letters, 96(13), pp. 133105-1.

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Abstract

The possibility of independent control of the surface fluxes of energy and hydrogen-containing radicals, thus enabling selective control of the nanostructure heating and passivation, is demonstrated. In situ energy flux measurements reveal that even a small addition of H2 to low-pressure Ar plasmas leads to a dramatic increase in the energy deposition through H recombination on the surface. The heat release is quenched by a sequential addition of a hydrocarbon precursor while the surface passivation remains effective. Such selective control offers an effective mechanism for deterministic control of the growth shape, crystallinity, and density of nanostructures in plasma-aided nanofabrication. © 2010 American Institute of Physics.

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32 citations in Web of Science®

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ID Code: 73774
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.3374324
ISSN: 0003-6951
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2010 American Institute of Physics.
Deposited On: 11 Jul 2014 02:34
Last Modified: 22 Aug 2014 00:51

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