Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis : using pulsed bias to enhance process throughput and precision

Wu, X., Zhong, X., & Ostrikov, K. (2008) Nanopore processing in dielectric materials and dielectric template-assisted nanoarray synthesis : using pulsed bias to enhance process throughput and precision. Applied Physics Letters, 92(22), pp. 223104-1.

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Abstract

An effective technique to improve the precision and throughput of energetic ion condensation through dielectric nanoporous templates and reduce nanopore clogging by using finely tuned pulsed bias is proposed. Multiscale numerical simulations of ion deposition show the possibility of controlling the dynamic charge balance on the upper template's surface to minimize ion deposition on nanopore sidewalls and to deposit ions selectively on the substrate surface in contact with the pore opening. In this way, the shapes of nanodots in template-assisted nanoarray fabrication can be effectively controlled. The results are applicable to various processes involving porous dielectric nanomaterials and dense nanoarrays.

Impact and interest:

8 citations in Scopus
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14 citations in Web of Science®

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ID Code: 73775
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.2928219
ISSN: 0003-6951
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2008 American Institute of Physics
Deposited On: 10 Jul 2014 22:51
Last Modified: 22 Aug 2014 01:10

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