Controlled-bandgap silicon nitride nanomaterials : deterministic nitrogenation in high-density plasmas

Cheng, Q., Xu, S., & Ostrikov, K. (2010) Controlled-bandgap silicon nitride nanomaterials : deterministic nitrogenation in high-density plasmas. Journal of Materials Chemistry, 20(28), pp. 5853-5859.

View at publisher


To overcome major problems associated with insufficient incorporation of nitrogen in hydrogenated amorphous silicon nitride (a-SiNx:H) nanomaterials, which in turn impedes the development of controlled-bandgap nanodevices, here we demonstrate the possibility to achieve effective bandgap control in a broad range by using high-density inductively coupled plasmas. This achievement is related to the outstanding dissociation ability of such plasmas. It is shown that the compositional, structural, optical, and morphological properties of the synthesized a-SiNx:H nanomaterials can be effectively tailored through the manipulation of the flow rate ratio of the silane to nitrogen gases X. In particular, a wide bandgap of 5.21 eV can be uniquely achieved at a low flow rate ratio of the nitrogen to silane gas of 1.0, whereas typically used values often exceed 20.0. These results are highly-relevant to the development of the next-generation nanodevices that rely on the effective control of the functional nano-layer bandgap energies.

Impact and interest:

29 citations in Scopus
Search Google Scholar™
27 citations in Web of Science®

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

Full-text downloads:

98 since deposited on 11 Jul 2014
34 in the past twelve months

Full-text downloads displays the total number of times this work’s files (e.g., a PDF) have been downloaded from QUT ePrints as well as the number of downloads in the previous 365 days. The count includes downloads for all files if a work has more than one.

ID Code: 73782
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1039/c0jm01060j
ISSN: 0959-9428
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2010 Royal Society of Chemistry
Deposited On: 11 Jul 2014 03:24
Last Modified: 14 Jul 2014 01:24

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page