Disentangling fluxes of energy and matter in plasma-surface interactions : effect of process parameters

Wolter, M., Levchenko, I., Kersten, H., Kumar, S., & Ostrikov, K. (2010) Disentangling fluxes of energy and matter in plasma-surface interactions : effect of process parameters. Journal of Applied Physics, 108(5), 053302-1.

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Abstract

The possibility to discriminate between the relative importance of the fluxes of energy and matter in plasma-surface interaction is demonstrated by the energy flux measurements in low-temperature plasmas ignited by the radio frequency discharge (power and pressure ranges 50-250 W and 8-11.5 Pa) in Ar, Ar+ H2, and Ar+ H2 + CH4 gas mixtures typically used in nanoscale synthesis and processing of silicon- and carbon-based nanostructures. It is shown that by varying the gas composition and pressure, the discharge power, and the surface bias one can effectively control the surface temperature and the matter supply rates. The experimental findings are explained in terms of the plasma-specific reactions in the plasma bulk and on the surface.

Impact and interest:

5 citations in Scopus
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6 citations in Web of Science®

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19 since deposited on 11 Jul 2014
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ID Code: 73796
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.3475728
ISSN: 0021-8979
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2010 American Institute of Physics
Deposited On: 11 Jul 2014 01:49
Last Modified: 13 Jul 2014 23:32

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