Dynamics of mode transitions in inductively-coupled plasmas

Ostrikov, K., Tsakadze, E., Jiang, N., Tsakadze, Z., Long, J., Storer, R., & Xu, S. (2002) Dynamics of mode transitions in inductively-coupled plasmas. IEEE Transactions on Plasma Science, 30(1), pp. 128-129.

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The dynamics of transitions between the electrostatic and electromagnetic discharge modes of the low-frequency (460 kHz) inductively coupled plasma (LF ICP) reactor is studied. A series of images of plasma glows in Ar and N2 gases taken in the process of continuous variation of the input power confirms the discharge bistability and hysteresis. The operation regimes and parameters making the LF ICP reactor attractive for materials synthesis and processing applications are discussed.

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ID Code: 73828
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Hysteresis, Inductively-coupled plasma, Mode transition
DOI: 10.1109/TPS.2002.1003957
ISSN: 0093-3813
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 14 Jul 2014 00:00
Last Modified: 14 Jul 2014 00:00

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