Synthesis of functional nanoassemblies in reactive plasmas

Ostrikov, K., Long, J.D., Rutkevych, P.P., & Xu, S. (2006) Synthesis of functional nanoassemblies in reactive plasmas. Vacuum, 80(11-12), pp. 1126-1131.

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Synthesis of various functional nanoassemblies, by using a combination of low-pressure reactive plasma-enhanced chemical deposition and plasma-assisted rf magnetron sputtering deposition is reported. This paper details how selective generation and manipulation of the required building blocks and management of unwanted nanoparticle contaminants, can be used for plasma-aided nanofabrication of carbon nanotip microemitter structures, ultra-high aspect ratio semiconductor nanowires, ordered quantum dot arrays, and microporous hydroxyapatite bioceramics. Emerging challenges of the plasma-aided synthesis of functional nanofilms and nanoassemblies are also discussed.

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41 citations in Scopus
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65 citations in Web of Science®

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ID Code: 73835
Item Type: Journal Article
Refereed: Yes
Additional Information: Paper presented in The 5th International Symposium on Applied Plasma Science, 26-30 September 2005, Hawaii, USA
Additional URLs:
Keywords: Deterministic nanofabrication, Nano- and biomaterials, Nanoassembly, PECVD, Reactive plasma
DOI: 10.1016/j.vacuum.2006.01.025
ISSN: 0042-207X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 13 Jul 2014 23:11
Last Modified: 15 Jul 2014 01:26

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