Integrated plasma-aided nanofabrication facility: Operation, parameters, and assembly of quantum structures and functional nanomaterials

Xu, S., Ostrikov, K., Long, J.D., & Huang, S.Y. (2006) Integrated plasma-aided nanofabrication facility: Operation, parameters, and assembly of quantum structures and functional nanomaterials. Vacuum, 80(6), pp. 621-630.

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Abstract

The development, operation, and applications of two configurations of an integrated plasma-aided nanofabrication facility (IPANF) comprising low-frequency inductively coupled plasma-assisted, low-pressure, multiple-target RF magnetron sputtering plasma source, are reported. The two configurations of the plasma source have different arrangements of the RF inductive coil: a conventional external flat spiral "pancake" coil and an in-house developed internal antenna comprising two orthogonal RF current sheets. The internal antenna configuration generates a "unidirectional" RF current that deeply penetrates into the plasma bulk and results in an excellent uniformity of the plasma over large areas and volumes. The IPANF has been employed for various applications, including low-temperature plasma-enhanced chemical vapor deposition of vertically aligned single-crystalline carbon nanotips, growth of ultra-high aspect ratio semiconductor nanowires, assembly of optoelectronically important Si, SiC, and Al1-xInxN quantum dots, and plasma-based synthesis of bioactive hydroxyapatite for orthopedic implants.

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69 citations in Web of Science®

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ID Code: 73836
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Biomaterials, Nanostructures, Plasma processing and deposition, Quantum effects
DOI: 10.1016/j.vacuum.2005.07.010
ISSN: 0042-207X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 13 Jul 2014 23:15
Last Modified: 15 Jul 2014 01:32

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