Plasma Nanoscience : Basic Concepts and Applications of Deterministic Nanofabrication

Ostrikov, Kostya (2008) Plasma Nanoscience : Basic Concepts and Applications of Deterministic Nanofabrication. Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, pp. 249-340.

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Abstract

Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.

The author has worked with numerous R&D institutions around the world, and here he begins with an introductory overview of plasma processing at micro- and nanoscales, as well as the current problems and challenges, before going on to address surface preparation, generation and diagnostics, transport and the manipulation of nano units.

Impact and interest:

28 citations in Scopus
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ID Code: 73838
Item Type: Book
Keywords: Arrays of quantum dots, Nanocluster fluxes, Plasma-exposed surfaces, Self-organization processes, Surface science
DOI: 10.1002/9783527623327
ISBN: 9783527407408
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 14 Jul 2014 01:21
Last Modified: 15 Jul 2014 01:57

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