Tailoring carbon nanotips in the plasma-assisted chemical vapor deposition: Effect of the process parameters

Wang, B.B. & Ostrikov, K. (2009) Tailoring carbon nanotips in the plasma-assisted chemical vapor deposition: Effect of the process parameters. Journal of Applied Physics, 105(8), 083303-1.

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Abstract

Carbon nanotips have been synthesized from a thin carbon film deposited on silicon by bias-enhanced hot filament chemical vapor deposition under different process parameters. The results of scanning electron microscopy indicate that high-quality carbon nanotips can only be obtained under conditions when the ion flux is effectively drawn from the plasma sustained in a CH4 + NH3 + H2 gas mixture. It is shown that the morphology of the carbon nanotips can be controlled by varying the process parameters such as the applied bias, gas pressure, and the NH3 / H2 mass flow ratios. The nanotip formation process is examined through a model that accounts for surface diffusion, in addition to sputtering and deposition processes included in the existing models. This model makes it possible to explain the major difference in the morphologies of the carbon nanotips formed without and with the aid of the plasma as well as to interpret the changes of their aspect ratio caused by the variation in the ion/gas fluxes. Viable ways to optimize the plasma-based process parameters to synthesize high-quality carbon nanotips are suggested. The results are relevant to the development of advanced plasma-/ion-assisted methods of nanoscale synthesis and processing.

Impact and interest:

15 citations in Scopus
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6 citations in Web of Science®

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ID Code: 73842
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.3112025
ISSN: 0021-8979
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2009 American Institute of Physics
Deposited On: 14 Jul 2014 01:06
Last Modified: 14 Jul 2014 23:14

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