Pulsed i-PVD of dielectric nanodot arrays using a nanoporous template

Zhong, Xiaoxia, Wu, Xiaochen, & Ostrikov, Kostya (2009) Pulsed i-PVD of dielectric nanodot arrays using a nanoporous template. Plasma Processes and Polymers, 6(3), pp. 161-169.

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The results of multi-scale numerical simulations of pulsed i-PVD template-assisted nanofabrication of ZnO nanodot arrays on a silicon substrate are presented. The ratios and spatial distributions of the ion fluxes deposited on the lateral and bottom surfaces of the nanopores are computed as a function of the external bias and plasma parameters. The results show that the pulsed bias plays a significant role in the ion current distribution inside the nanopores. The results of numerical experiments of this work suggest that by finely adjusting the pulse voltage, the pulse duration and the duty cycle of the external pulsed bias, the nanopore clogging can be successfully avoided during the deposition and the shapes of the deposited ZnO nanodots can be effectively controlled. A figure is presented.

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5 citations in Scopus
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13 citations in Web of Science®

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ID Code: 73846
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Ionic physical vapor deposition, Monte carlo simulation, Nanodots, Nanofabrication, ZnO
DOI: 10.1002/ppap.200800129
ISSN: 1612-8850
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 14 Jul 2014 00:48
Last Modified: 14 Jul 2014 23:01

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