Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas
Denysenko, I. B., Ostrikov, K., Xu, S., Yu, M. Y., & Diong, C. H. (2003) Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas. Journal of Applied Physics, 94(9), pp. 6097-6107.
The nanopowder management and control of plasma parameters in electronegative SiH4 plasmas were discussed. The spatial profiles of electron and positive/negative ion number densities, electron temperature and charge of the fine particles were obtained. It was found that management of powder charge distribution is also possible through control of the external parameters.
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|Item Type:||Journal Article|
|Keywords:||nanopowders, numerical modeling, photon density, plasma temperature, nanoparticles|
|Divisions:||Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
|Copyright Owner:||Copyright 2003 American Institute of Physics|
|Deposited On:||14 Jul 2014 23:08|
|Last Modified:||14 Jul 2014 23:08|
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