Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas

Denysenko, I. B., Ostrikov, K., Xu, S., Yu, M. Y., & Diong, C. H. (2003) Nanopowder management and control of plasma parameters in electronegative SiH4 plasmas. Journal of Applied Physics, 94(9), pp. 6097-6107.

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Abstract

The nanopowder management and control of plasma parameters in electronegative SiH4 plasmas were discussed. The spatial profiles of electron and positive/negative ion number densities, electron temperature and charge of the fine particles were obtained. It was found that management of powder charge distribution is also possible through control of the external parameters.

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53 since deposited on 14 Jul 2014
12 in the past twelve months

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ID Code: 73870
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: nanopowders, numerical modeling, photon density, plasma temperature, nanoparticles
DOI: 10.1063/1.1618356
ISSN: 1089-7550
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2003 American Institute of Physics
Deposited On: 14 Jul 2014 23:08
Last Modified: 14 Jul 2014 23:08

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