Suppression of current fluctuations in a crossed E×B field system for low-voltage plasma immersion treatment

Levchenko, I., Keidar, M., Ostrikov, K., & Yu, M. Y. (2006) Suppression of current fluctuations in a crossed E×B field system for low-voltage plasma immersion treatment. Journal of Applied Physics, 99(1), 013301.

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Plasma transport in a hybrid dc vacuum arc plasma source for ion deposition and plasma immersion treatment is considered. It is found that external crossed electric and magnetic fields near the substrate can significantly reduce the relative amplitude of ion current fluctuations I-f at the substrate surface. In particular, I-f decreases with the applied magnetic field when the bias voltage exceeds 300 V, thus allowing one to reduce the deviations from the rated process parameters. This phenomenon can be attributed to an interaction between the metal-plasma jet from the arc source and the discharge plasma in the crossed fields. © 2006 American Institute of Physics.

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ID Code: 73875
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.2136416
ISSN: 0021-8979
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: © 2006 American Institute of Physics
Deposited On: 15 Jul 2014 00:51
Last Modified: 16 Jul 2014 02:53

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