Power transfer and mode transitions in low-frequency inductively coupled plasmas
Ostrikov, K., Xu, S., & Yu, M.Y. (2000) Power transfer and mode transitions in low-frequency inductively coupled plasmas. Journal of Applied Physics, 88(5), pp. 2268-2271.
Operation and mode jumps in low-frequency (500 kHz) radio-frequency inductively coupled plasmas are investigated. The discharge is driven by a flat inductive coil which can excite the electrostatic (E) and electromagnetic (H) discharge modes. The power transfer efficiency and mode transition behavior are studied. It is found that the power reflection coefficient as a function of the input power is minimal in the vicinity of the mode transitions and exhibits hysteresis, which is also observed when the operating gas pressure is varied.
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|Item Type:||Journal Article|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Copyright Owner:||Copyright 2000 American Institute of Physics|
|Deposited On:||14 Jul 2014 05:24|
|Last Modified:||14 Jul 2014 05:24|
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