Power transfer and mode transitions in low-frequency inductively coupled plasmas

Ostrikov, K., Xu, S., & Yu, M.Y. (2000) Power transfer and mode transitions in low-frequency inductively coupled plasmas. Journal of Applied Physics, 88(5), pp. 2268-2271.

View at publisher

Abstract

Operation and mode jumps in low-frequency (500 kHz) radio-frequency inductively coupled plasmas are investigated. The discharge is driven by a flat inductive coil which can excite the electrostatic (E) and electromagnetic (H) discharge modes. The power transfer efficiency and mode transition behavior are studied. It is found that the power reflection coefficient as a function of the input power is minimal in the vicinity of the mode transitions and exhibits hysteresis, which is also observed when the operating gas pressure is varied.

Impact and interest:

88 citations in Scopus
Search Google Scholar™
85 citations in Web of Science®

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

Full-text downloads:

84 since deposited on 14 Jul 2014
38 in the past twelve months

Full-text downloads displays the total number of times this work’s files (e.g., a PDF) have been downloaded from QUT ePrints as well as the number of downloads in the previous 365 days. The count includes downloads for all files if a work has more than one.

ID Code: 73881
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.1289055
ISSN: 0021-8979
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2000 American Institute of Physics
Deposited On: 14 Jul 2014 05:24
Last Modified: 14 Jul 2014 05:24

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page