Power transfer and mode transitions in low-frequency inductively coupled plasmas

Ostrikov, K., Xu, S., & Yu, M.Y. (2000) Power transfer and mode transitions in low-frequency inductively coupled plasmas. Journal of Applied Physics, 88(5), pp. 2268-2271.

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Operation and mode jumps in low-frequency (500 kHz) radio-frequency inductively coupled plasmas are investigated. The discharge is driven by a flat inductive coil which can excite the electrostatic (E) and electromagnetic (H) discharge modes. The power transfer efficiency and mode transition behavior are studied. It is found that the power reflection coefficient as a function of the input power is minimal in the vicinity of the mode transitions and exhibits hysteresis, which is also observed when the operating gas pressure is varied.

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ID Code: 73881
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.1289055
ISSN: 0021-8979
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2000 American Institute of Physics
Deposited On: 14 Jul 2014 05:24
Last Modified: 14 Jul 2014 05:24

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