Standing surface waves in a dust-contaminated large-area planar plasma source
Ostrikov, K., Yu, M.Y., & Sugai, H. (1999) Standing surface waves in a dust-contaminated large-area planar plasma source. Journal of Applied Physics, 86(5), pp. 2425-2430.
The effect of charged particulates or dusts on surface wave produced microwave discharges is studied. The frequencies of the standing electromagnetic eigenmodes of large-area flat plasmas are calculated. The dusts absorb a significant amount of the plasma electrons and can lead to a modification of the electromagnetic field structure in the discharge by shifting the originally excited operating mode out of resonance. For certain given proportions of dusts, mode conversion is found to be possible. The power loss in the discharge is also increased because of dust-specific dissipations, leading to a decrease of the operating mode quality factor.
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|Item Type:||Journal Article|
|Copyright Owner:||Copyright 1999 American Institute of Physics|
|Deposited On:||14 Jul 2014 02:40|
|Last Modified:||14 Jul 2014 02:40|
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