Discharge parameters and dominant electron conductivity mechanism in a low-pressure planar magnetron discharge

Baranov, O., Romanov, M., & Ostrikov, K. (2009) Discharge parameters and dominant electron conductivity mechanism in a low-pressure planar magnetron discharge. Physics of Plasmas, 16(6), 063505-1.

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Abstract

Parameters of a discharge sustained in a planar magnetron configuration with crossed electric and magnetic fields are studied experimentally and numerically. By comparing the data obtained in the experiment with the results of calculations made using the proposed theoretical model, conclusion was made about the leading role of the turbulence-driven Bohm electron conductivity in the low-pressure operation mode (up to 1 Pa) of the discharge in crossed electric and magnetic fields. A strong dependence of the width of the cathode sputter trench, associated with the ionization region of the magnetron discharge, on the discharge parameters was observed in the experiments. The experimental data were used as input parameters in the discharge model that describes the motion of secondary electrons across the magnetic field in the ionization region and takes into account the classical, near-wall, and Bohm mechanisms of electron conductivity.

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ID Code: 73925
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.3153554
ISSN: 1070-664X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2009 American Institute of Physics
Deposited On: 15 Jul 2014 02:11
Last Modified: 16 Jul 2014 00:57

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