Discharge parameters and dominant electron conductivity mechanism in a low-pressure planar magnetron discharge

Baranov, O., Romanov, M., & Ostrikov, K. (2009) Discharge parameters and dominant electron conductivity mechanism in a low-pressure planar magnetron discharge. Physics of Plasmas, 16(6), 063505-1.

View at publisher


Parameters of a discharge sustained in a planar magnetron configuration with crossed electric and magnetic fields are studied experimentally and numerically. By comparing the data obtained in the experiment with the results of calculations made using the proposed theoretical model, conclusion was made about the leading role of the turbulence-driven Bohm electron conductivity in the low-pressure operation mode (up to 1 Pa) of the discharge in crossed electric and magnetic fields. A strong dependence of the width of the cathode sputter trench, associated with the ionization region of the magnetron discharge, on the discharge parameters was observed in the experiments. The experimental data were used as input parameters in the discharge model that describes the motion of secondary electrons across the magnetic field in the ionization region and takes into account the classical, near-wall, and Bohm mechanisms of electron conductivity.

Impact and interest:

2 citations in Scopus
3 citations in Web of Science®
Search Google Scholar™

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

Full-text downloads:

62 since deposited on 15 Jul 2014
17 in the past twelve months

Full-text downloads displays the total number of times this work’s files (e.g., a PDF) have been downloaded from QUT ePrints as well as the number of downloads in the previous 365 days. The count includes downloads for all files if a work has more than one.

ID Code: 73925
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.3153554
ISSN: 1070-664X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2009 American Institute of Physics
Deposited On: 15 Jul 2014 02:11
Last Modified: 21 Jun 2017 14:49

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page