A model of a large-area planar plasma producer based on surface wave propagation in a plasma-metal structure with a dielectric sheath

Azarenkov, N. A., Denisenko, I. B., & Ostrikov, K. (1995) A model of a large-area planar plasma producer based on surface wave propagation in a plasma-metal structure with a dielectric sheath. Journal of Physics D: Applied Physics, 28(12), pp. 2465-2469.

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Abstract

A theoretical model of a large-area planar plasma producer based on surface wave (SW) propagation in a plasma-metal structure with a dielectric sheath is presented. The SW which produces and sustains the microwave gas discharge in the planar structure propagates along an external magnetic field and possesses an eigenfrequency within the range between electron cyclotron and electron plasma frequencies. The spatial distributions of the produced plasma density, electromagnetic fields, energy flow density, phase velocity and reverse skin depth of the SW are obtained analytically and numerically.

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ID Code: 73945
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1088/0022-3727/28/12/011
ISSN: 0022-3727
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 1995 Institute of Physics (IOP) Publishing
Deposited On: 15 Jul 2014 23:55
Last Modified: 15 Jul 2014 23:55

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