Nanocrystalline vanadium oxide films synthesized by plasma-assisted reactive rf sputtering deposition

Lim, S. P., Long, J. D., Xu, S., & Ostrikov, K. (2007) Nanocrystalline vanadium oxide films synthesized by plasma-assisted reactive rf sputtering deposition. Journal of Physics D: Applied Physics, 40(4), pp. 1085-1090.

View at publisher

Abstract

Plasma-assisted reactive rf magnetron sputtering deposition is used to fabricate vanadium oxide films on glass, silica and silicon substrates. The process conditions are optimized to synthesize phase-pure vanadium pentoxide (V2O5) featuring a nanocrystalline structure with the predominant (0 0 1) crystallographic orientation, surface morphology with rod-like nanosized grains and very uniform (the non-uniformity does not exceed 4%) coating thickness over large surface areas. The V2O5 films also show excellent and temperature-independent optical transmittance in a broad temperature range (20-95 °C). The results are relevant to the development of smart functional coatings with temperature-tunable properties. © 2007 IOP Publishing Ltd.

Impact and interest:

29 citations in Scopus
Search Google Scholar™
25 citations in Web of Science®

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 73951
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1088/0022-3727/40/4/026
ISSN: 0022-3727
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: © 2007 IOP Publishing Ltd.
Deposited On: 16 Jul 2014 00:09
Last Modified: 17 Jul 2014 03:29

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page