Plasma-aided nanofabrication: where is the cutting edge?

Ostrikov, K. & Murphy, A. B. (2007) Plasma-aided nanofabrication: where is the cutting edge? Journal of Physics D: Applied Physics, 40(8), pp. 2223-2241.

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Abstract

Plasma-aided nanofabrication is a rapidly expanding area of research spanning disciplines ranging from physics and chemistry of plasmas and gas discharges to solid state physics, materials science, surface science, nanoscience and nanotechnology and related engineering subjects. The current status of the research field is discussed and examples of superior performance and competitive advantage of plasma processes and techniques are given. These examples are selected to represent a range of applications of two major types of plasmas suitable for nanoscale synthesis and processing, namely thermally non-equilibrium and thermal plasmas. Major concepts and terminology used in the field are introduced. The paper also pinpoints the major challenges facing plasma-aided nanofabrication and identifies some emerging topics for future research. © 2007 IOP Publishing Ltd.

Impact and interest:

116 citations in Scopus
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195 citations in Web of Science®

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ID Code: 73952
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1088/0022-3727/40/8/S01
ISSN: 0022-3727
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: © 2007 IOP Publishing Ltd.
Deposited On: 15 Jul 2014 23:59
Last Modified: 17 Jul 2014 03:32

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