Nanoscale surface and interface engineering : why plasma-aided?

Ostrikov, K., Xu, S., Huang, S.Y., & Levchenko, I. (2008) Nanoscale surface and interface engineering : why plasma-aided? Surface and Coatings Technology, 202(22-23), pp. 5314-5318.

View at publisher


This contribution provides arguments why and in which cases low-temperature plasmas should be used for nanoscale surface and interface engineering and discusses several advantages offered by plasma-based processes and tools compared to neutral gas fabrication routes. Relevant processes involve nanotexturing (etching, sputtering, nanostructuring, pre-patterning, etc.) and composition/structure control at nanoscales (phases, layering, elemental presence, doping, functionalization, etc.) and complex combinations thereof. A case study in p-Si/n-Si solar cell junction exemplifies a successful use of inductively coupled plasma-assisted RF magnetron sputtering for nanoscale fabrication of a bi-layered stack of unconventionally doped highly-crystalline silicon nanofilms with engineered high-quality interfaces.

Impact and interest:

7 citations in Scopus
8 citations in Web of Science®
Search Google Scholar™

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 73970
Item Type: Journal Article
Refereed: Yes
Additional Information: Paper presented in the Sixth Asian-European International Conference on Plasma Surface Engineering
Additional URLs:
Keywords: Nanofilms, p-n junction, PECVD, Plasma sources, Solar cells, Surface and interface properties
DOI: 10.1016/j.surfcoat.2008.06.165
ISSN: 0257-8972
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 16 Jul 2014 01:10
Last Modified: 22 Jun 2017 00:01

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page