Nanopowder management and plasma parameters in nanofabrication of low-dimensional quantum structures in reactive silane-based plasmas

Ostrikov, K., Denysenko, I., Yu, M.Y., & Xu, S. (2005) Nanopowder management and plasma parameters in nanofabrication of low-dimensional quantum structures in reactive silane-based plasmas. Physica Scripta, 72(2-3), pp. 277-280.

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Abstract

Management of nanopowder and reactive plasma parameters in a low-pressure RF glow discharge in silane is studied. It is shown that the discharge control parameters and reactor volume can be adjusted to ensure lower abundance of nanopowders, which is one of the requirements of the plasma-assisted fabrication of low-dimensional quantum nanostructures. The results are relevant to micro- and nanomanufacturing technologies employing low-pressure glow discharge plasmas of silane-based gas mixtures.

Impact and interest:

6 citations in Scopus
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5 citations in Web of Science®

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ID Code: 74006
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1238/Physica.Regular.072a00277
ISSN: 0031-8949
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 17 Jul 2014 03:19
Last Modified: 17 Jul 2014 23:28

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