Bistability and hysteresis in inductively coupled plasmas

Ostrikov, K., Xu, S., & Lee, S. (2000) Bistability and hysteresis in inductively coupled plasmas. Physica Scripta, 62(2-3), pp. 189-193.

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Abstract

The transition between the two stable operation regimes (E and H discharge modes) in inductively coupled argon plasmas has been studied experimentally and theoretically. Analogy with other physical phenomena exhibiting hysteresis has been drawn. Analysis of power balance, electromagnetic field, plasma parameters, densities of the excited states, and optical emission spectra shows that the hysteresis may be due to nonlinearities associated with step-wise ionization through excited states of the argon atoms.

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6 citations in Web of Science®

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ID Code: 74009
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1238/Physica.Regular.062a00189
ISSN: 0031-8949
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 17 Jul 2014 01:37
Last Modified: 17 Jul 2014 01:37

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