Bistability and hysteresis in inductively coupled plasmas
Ostrikov, K., Xu, S., & Lee, S. (2000) Bistability and hysteresis in inductively coupled plasmas. Physica Scripta, 62(2-3), pp. 189-193.
The transition between the two stable operation regimes (E and H discharge modes) in inductively coupled argon plasmas has been studied experimentally and theoretically. Analogy with other physical phenomena exhibiting hysteresis has been drawn. Analysis of power balance, electromagnetic field, plasma parameters, densities of the excited states, and optical emission spectra shows that the hysteresis may be due to nonlinearities associated with step-wise ionization through excited states of the argon atoms.
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|Item Type:||Journal Article|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Deposited On:||17 Jul 2014 01:37|
|Last Modified:||17 Jul 2014 01:37|
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