Simulation of gas-phase nanoparticle dynamics in the plasma-enhanced chemical vapor deposition of carbon nanostructures

Rutkevych, P.P., Ostrikov, K., Denysenko, I.B., Storer, R.G., & Xu, S. (2004) Simulation of gas-phase nanoparticle dynamics in the plasma-enhanced chemical vapor deposition of carbon nanostructures. Physica Scripta, 70(5), pp. 322-325.

View at publisher


The results of 1D simulation of nanoparticle dynamics in the areas adjacent to nanostructured carbon-based films exposed to chemically active complex plasma of CH4 + H2 + Ar gas mixtures are presented. The nanoparticle-loaded near-substrate (including sheath and presheath) areas of a low-frequency (0.5 MHz) inductively coupled plasma facility for the PECVD growth of the ordered carbon-based nanotip structures are considered. The conditions allowing one to predict the size of particles that can pass through the plasma sheath and softly land onto the surface are formulated. The possibility of soft nano-cluster deposition without any additional acceleration common for some existing nano-cluster deposition schemes is demonstrated. The effect of the substrate heating power and the average atomic mass of neutral species is studied numerically and verified experimentally.

Impact and interest:

5 citations in Scopus
Search Google Scholar™
5 citations in Web of Science®

Citation counts are sourced monthly from Scopus and Web of Science® citation databases.

These databases contain citations from different subsets of available publications and different time periods and thus the citation count from each is usually different. Some works are not in either database and no count is displayed. Scopus includes citations from articles published in 1996 onwards, and Web of Science® generally from 1980 onwards.

Citations counts from the Google Scholar™ indexing service can be viewed at the linked Google Scholar™ search.

ID Code: 74010
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1088/0031-8949/70/5/010
ISSN: 0031-8949
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 17 Jul 2014 01:41
Last Modified: 18 Jul 2014 00:33

Export: EndNote | Dublin Core | BibTeX

Repository Staff Only: item control page