Turning points, power transfer, and frequency response of mode transitions in RF plasmas

Tsakadze, E. L., Ostrikov, K. N., Xu, S., Long, J., Jiang, N., Tsakadze, Z. L., Yu, M. Y., & Storer, R. (2001) Turning points, power transfer, and frequency response of mode transitions in RF plasmas. Physica Scripta, 64(4), pp. 360-365.

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Turning points for transitions between the electrostatic and electromagnetic discharge modes in low-frequency (∼ 500 kHz) inductively coupled plasmas have been identified and cross-referenced using time-resolved measurements of the plasma optical emission intensities, RF coil current, and ion saturation current collected by a single RF-compensated Langmuir probe. This enables one to monitor the variation of the plasma parameters, power transfer efficiency, which accompany the discharge hysteresis. The excitation conditions for the pure and hybrid modes in the plasma are considered, and the possibility of the TMmnl → TEm'n'l' transitions at higher frequencies are discussed.

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4 citations in Scopus
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3 citations in Web of Science®

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ID Code: 74011
Item Type: Journal Article
Refereed: Yes
DOI: 10.1238/Physica.Regular.064a00360
ISSN: 0031-8949
Divisions: Current > Schools > School of Chemistry, Physics & Mechanical Engineering
Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 16 Jul 2014 23:51
Last Modified: 16 Jul 2014 23:51

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