Parameters and equilibrium profiles for large-area surface-wave sustained plasmas
Denysenko, I.B., Gapon, A.V., Azarenkov, N.A., Ostrikov, K., & Yu, M.Y. (2002) Parameters and equilibrium profiles for large-area surface-wave sustained plasmas. Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), 65(4), 046419-1---11.
The equilibrium profiles of the plasma parameters of large-area if discharges in a finite-length metal-shielded dielectric cylinder are computed using a two-dimensional fluid code. The rf power is coupled to the plasma through edge-localized surface waves traveling in the azimuthal direction along the plasma edge. It is shown that self-consistent accounting for axial plasma diffusion and radial nonuniformity of the electron temperature can explain the frequently reported deviations of experimentally measured radial density profiles from that of the conventional linear diffusion models. The simulation results are in a good agreement with existing experimental data obtained from surface-wave sustained large-diameter plasmas. © 2002 The American Physical Society.
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|Item Type:||Journal Article|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Copyright Owner:||Copyright 2002 American Physical Society|
|Deposited On:||16 Jul 2014 01:55|
|Last Modified:||16 Jul 2014 01:55|
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