Effect of an internal rotating current on low-frequency inductively coupled plasmas

Tsakadze, E.L., Ostrikov, K., Xu, S., Jones, I.R., Storer, R., Yu, M.Y., & Lee, S. (2001) Effect of an internal rotating current on low-frequency inductively coupled plasmas. Physical Review E (Statistical, Nonlinear, and Soft Matter Physics), 63(4), 046402-1---9.

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Abstract

The effects of an inductively rotating current were observed on low-frequency inductively coupled plasmas. The spatial distribution of electromagnetic fields was investigated in a cylindrical metallic chamber filled with dense plasma. The distribution of the magnetic field in plasma chamber was observed for rarefied and dense plasmas. The plasma was assumed as uniform in the electromagnetic fields. The results showed the plasma density increased with power and the electron density increased with pressure.

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3 citations in Scopus
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3 citations in Web of Science®

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23 since deposited on 16 Jul 2014
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ID Code: 74021
Item Type: Journal Article
Refereed: Yes
DOI: 10.1103/PhysRevE.63.046402
ISSN: 1539-3755
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2001 American Physical Society
Deposited On: 16 Jul 2014 02:05
Last Modified: 16 Jul 2014 02:05

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