Growth kinetics of carbon nanowall-like structures in low-temperature plasmas

Levchenko, I., Ostrikov, K., Rider, A.E., Tam, E., Vladimirov, S.V., & Xu, S. (2007) Growth kinetics of carbon nanowall-like structures in low-temperature plasmas. Physics of Plasmas, 14(6), 063502-1.

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The results of a hybrid numerical simulation of the growth kinetics of carbon nanowall-like nanostructures in the plasma and neutral gas synthesis processes are presented. The low-temperature plasma-based process was found to have a significant advantage over the purely neutral flux deposition in providing the uniform size distribution of the nanostructures. It is shown that the nanowall width uniformity is the best (square deviations not exceeding 1.05) in high-density plasmas of 3.0× 1018 m-3, worsens in lower-density plasmas (up to 1.5 in 1.0× 1017 m-3 plasmas), and is the worst (up to 1.9) in the neutral gas-based process. This effect has been attributed to the focusing of ion fluxes by irregular electric field in the vicinity of plasma-grown nanostructures on substrate biased with -20 V potential, and differences in the two-dimensional adatom diffusion fluxes in the plasma and neutral gas-based processes. The results of our numerical simulations are consistent with the available experimental reports on the effect of the plasma process parameters on the sizes and shapes of relevant nanostructures.

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29 citations in Scopus
27 citations in Web of Science®
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ID Code: 74030
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1063/1.2744353
ISSN: 1070-664X
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright 2007 American Institute of Physics
Deposited On: 16 Jul 2014 04:58
Last Modified: 22 Jun 2017 01:01

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