Two-dimensional simulation of nanoassembly precursor species in Ar+H2+C2H2 reactive plasmas

Ostrikov, Kostya, Yoon, Hyun-Jin, Rider, Amanda E., & Vladimirov, Sergey V. (2007) Two-dimensional simulation of nanoassembly precursor species in Ar+H2+C2H2 reactive plasmas. Plasma Processes and Polymers, 4(1), pp. 27-40.

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The results of two-dimensional fluid simulation of number densities and fluxes of the main building blocks and surface preparation species involved in nanoassembly of carbon-based nanopatterns in Ar+H2+C2H2 reactive plasmas are reported. It is shown that the process parameters and non-uniformity of surface fluxes of each particular species may affect the targeted nanopattern quality. The results can be used to improve predictability of plasma-aided nanofabrication processes and optimize the parameters of plasma nanotools.KGaA, Weinheim.

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ID Code: 74034
Item Type: Journal Article
Refereed: Yes
Additional URLs:
DOI: 10.1002/ppap.200600070
ISSN: 1612-8850
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Copyright Owner: Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Deposited On: 16 Jul 2014 23:45
Last Modified: 17 Jul 2014 23:45

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