Two-dimensional simulation of nanoassembly precursor species in Ar+H2+C2H2 reactive plasmas
Ostrikov, Kostya, Yoon, Hyun-Jin, Rider, Amanda E., & Vladimirov, Sergey V. (2007) Two-dimensional simulation of nanoassembly precursor species in Ar+H2+C2H2 reactive plasmas. Plasma Processes and Polymers, 4(1), pp. 27-40.
The results of two-dimensional fluid simulation of number densities and fluxes of the main building blocks and surface preparation species involved in nanoassembly of carbon-based nanopatterns in Ar+H2+C2H2 reactive plasmas are reported. It is shown that the process parameters and non-uniformity of surface fluxes of each particular species may affect the targeted nanopattern quality. The results can be used to improve predictability of plasma-aided nanofabrication processes and optimize the parameters of plasma nanotools.KGaA, Weinheim.
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|Item Type:||Journal Article|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Copyright Owner:||Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim|
|Deposited On:||16 Jul 2014 23:45|
|Last Modified:||17 Jul 2014 23:45|
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