Ge/Si quantum dot formation from non-uniform cluster fluxes
Rider, Amanda E., Levchenko, Igor, Ostrikov, Kostya, & Keidar, Michael (2007) Ge/Si quantum dot formation from non-uniform cluster fluxes. Plasma Processes and Polymers, 4(6), pp. 638-647.
The controlled growth of ultra-small Ge/Si quantum dot (QD) nuclei (≈1 nm) suitable for the synthesis of uniform nanopatterns with high surface coverage, is simulated using atom-only and size non-uniform cluster fluxes. It is found that seed nuclei of more uniform sizes are formed when clusters of non-uniform size are deposited. This counter-intuitive result is explained via adatom-nanocluster interactions on Si(100) surfaces. Our results are supported by experimental data on the geometric characteristics of QD patterns synthesized by nanocluster deposition. This is followed by a description of the role of plasmas as non-uniform cluster sources and the impact on surface dynamics. The technique challenges conventional growth modes and is promising for deterministic synthesis of nanodot arrays.
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|Item Type:||Journal Article|
|Keywords:||Diffusion, Nanostructures, Nucleation, Plasma nanofabrication, Quantum dots|
|Divisions:||Current > QUT Faculties and Divisions > Science & Engineering Faculty|
|Deposited On:||17 Jul 2014 01:58|
|Last Modified:||17 Jul 2014 23:48|
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