Ge/Si quantum dot formation from non-uniform cluster fluxes

Rider, Amanda E., Levchenko, Igor, Ostrikov, Kostya, & Keidar, Michael (2007) Ge/Si quantum dot formation from non-uniform cluster fluxes. Plasma Processes and Polymers, 4(6), pp. 638-647.

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Abstract

The controlled growth of ultra-small Ge/Si quantum dot (QD) nuclei (≈1 nm) suitable for the synthesis of uniform nanopatterns with high surface coverage, is simulated using atom-only and size non-uniform cluster fluxes. It is found that seed nuclei of more uniform sizes are formed when clusters of non-uniform size are deposited. This counter-intuitive result is explained via adatom-nanocluster interactions on Si(100) surfaces. Our results are supported by experimental data on the geometric characteristics of QD patterns synthesized by nanocluster deposition. This is followed by a description of the role of plasmas as non-uniform cluster sources and the impact on surface dynamics. The technique challenges conventional growth modes and is promising for deterministic synthesis of nanodot arrays.

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13 citations in Scopus
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11 citations in Web of Science®

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ID Code: 74036
Item Type: Journal Article
Refereed: Yes
Additional URLs:
Keywords: Diffusion, Nanostructures, Nucleation, Plasma nanofabrication, Quantum dots
DOI: 10.1002/ppap.200700043
ISSN: 1612-8850
Divisions: Current > QUT Faculties and Divisions > Science & Engineering Faculty
Deposited On: 17 Jul 2014 01:58
Last Modified: 17 Jul 2014 23:48

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